Novel green chemical mechanical polishing of fused silica through designing synergistic CeO2/h-BN abrasives with lubricity
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference57 articles.
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3. The influence of CeO2 abrasive size on the performance of photocatalytic assisted chemical-mechanical polishing by Y/Pr co-doping strategy;Colloids and Surfaces A: Physicochemical and Engineering Aspects;2024-03
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