The impact of the combination of xanthan gum and polyvinyl pyrrolidone (PVP) on the chemical mechanical polishing of through silicon via (TSV) barrier layer-Reference-Cited by-同舟云学术

The impact of the combination of xanthan gum and polyvinyl pyrrolidone (PVP) on the chemical mechanical polishing of through silicon via (TSV) barrier layer

Published:2024-03 Issue: Volume:38 Page:107749
ISSN:2352-4928
Container-title:Materials Today Communications
language:en
Short-container-title:Materials Today Communications

Author:

Zheng Tao^ORCID,Wang Ru^ORCID,Dong Yanwei,Chen Xuhua,Du Zhanjie

Publisher

Elsevier BV

Subject

Materials Chemistry,Mechanics of Materials,General Materials Science

Reference37 articles.

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3. GU S.Q., Ray U., Li Y., et al., 2010. 3D TSV integration technology challenges for high volume production from fabless supply chain aspect, 2010 Ieee International Interconnect Technology Conference. Burlingame, CA, USA: IEEE, 2010: 1–3, https://doi.org/10.1109/IITC.2010.5510309.

4. Behavior of palladium and its impact on intermetallic growth in palladium-coated Cu wire bonding;XU;Acta Mater.,2013

5. A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry;Zhang;Appl. Surf. Sci.,2018

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