Compound mechanical and chemical-mechanical polishing processing technique for single-crystal silicon carbide
-
Published:2024-03
Issue:
Volume:86
Page:160-169
-
ISSN:0141-6359
-
Container-title:Precision Engineering
-
language:en
-
Short-container-title:Precision Engineering
Author:
Ban XinxingORCID,
Tian Zhuangzhi,
Zhu Jianhui,
Duan Tianxu,
Zheng Shaodong,
Wang Ningchang,
Han Shaoxing,
Qiu Hui,
Li Zhengxin
Subject
General Engineering