1. College of Electrical Engineering Zhejiang University Hangzhou Zhejiang 310027 P. R. China
2. State Key Laboratory of Silicon and Advanced Semiconductor Materials & School of Materials Science and Engineering Zhejiang University Hangzhou Zhejiang 310027 P. R. China
3. Institute of Advanced Semiconductors & Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices ZJU‐Hangzhou Global Scientific and Technological Innovation Center Zhejiang University No. 733 Jianshe San Road Hangzhou Zhejiang 311200 P. R. China
4. School of Materials Science and Engineering & College of Chemistry Zhengzhou University Zhengzhou Henan 450001 P. R. China