Advances in Thermoelastic Damping in Micro- and Nano- Mechanical Resonators: a Review
Author:
Affiliation:
1. Department of Engineering Mechanics, Tsinghua University
2. Department of Mechanical Engineering, University of Hong Kong
Publisher
Japan Society of Mechanical Engineers
Link
https://www.jstage.jst.go.jp/article/jmmp/1/1/1_1_18/_pdf
Reference67 articles.
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4. (4) Yurke, B., et al., Theory of amplifier-noise evasion in an oscillator employing a nonlinear resonator, Physical Review A, Vol. 51 (1995), pp. 4211-4229
5. (5) Tang, W. C., et al., Electrostatic-comb drive of lateral polysilicon resonators, Sensors and Actuators A, Vol. 21 (1990), pp. 328-331
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