Nanomechanical Resonators: Toward Atomic Scale

Author:

Xu Bo1ORCID,Zhang Pengcheng2ORCID,Zhu Jiankai1ORCID,Liu Zuheng2ORCID,Eichler Alexander3ORCID,Zheng Xu-Qian45ORCID,Lee Jaesung46ORCID,Dash Aneesh7ORCID,More Swapnil7ORCID,Wu Song1ORCID,Wang Yanan48ORCID,Jia Hao9ORCID,Naik Akshay7ORCID,Bachtold Adrian10ORCID,Yang Rui211ORCID,Feng Philip X.-L.4ORCID,Wang Zenghui112ORCID

Affiliation:

1. Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu610054, China

2. University of Michigan−Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai200240, China

3. Department of Physics, ETH Zurich, 8093Zurich, Switzerland

4. Department of Electrical and Computer Engineering, Herbert Wertheim College of Engineering, University of Florida, Gainesville, Florida32611, United States

5. College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing210023, China

6. Department of Electrical and Computer Engineering, University of Texas at El Paso, El Paso, Texas79968, United States

7. Centre for Nano Science and Engineering, Indian Institute of Science, Bangalore560012, Karnataka, India

8. Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska68588, United States

9. Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai200050, China

10. ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, Castelldefels, Barcelona08860, Spain

11. School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai200240, China

12. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu610054, China

Funder

European Regional Development Fund

Office of Experimental Program to Stimulate Competitive Research

Department of Science and Technology, Ministry of Science and Technology

Generalitat de Catalunya

National Natural Science Foundation of China

National Science Foundation

Ministry of Electronics and Information technology

FUNDACI? Privada MIR-PUIG

Ministerio de Ciencia e Innovaci?n

Ministerio de Econom?a y Competitividad

Central University Basic Research Fund of China

Ministry of Human Resource Development

Science and Technology Commission of Shanghai Municipality

H2020 European Research Council

Ag?ncia de Gesti? d'Ajuts Universitaris i de Recerca

Fundacio Cellex

Lingang Laboratory Open Research Fund

Sichuan Science and Technology Program

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

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