Fabrication of Uniform Aluminium Nitrate Thin Film on 2-inch Silicon Substrate-Reference-Cited by-同舟云学术

Fabrication of Uniform Aluminium Nitrate Thin Film on 2-inch Silicon Substrate

Published:2023-09-26 Issue: Volume: Page:
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Container-title:2023 IEEE International Conference on Sensors and Nanotechnology (SENNANO)
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Author:

Abdullah Siti Ashraf Binti¹,Abd Aziz Nurul Syamimi Binti²,Mamat Mohamad Hafiz³,Azman Zulkifli⁴,Sahari Norain⁵,Mohamed Ahmad Nasrull⁶,Wijaya Yusmar Palapa⁷,Nayan Nafarizal¹

Affiliation:

1. Universiti Tun Hussein Onn Malaysia,Microelectronic and Nanotechnology – Shamsuddin Research Centre (MiNT-SRC),Parit Raja,Malaysia,86400

2. Universiti Tun Husseion Onn Malaysia,Faculty of Electrical and Electronic Engineeing,Parit Raja,Malaysia,86400

3. Universiti Teknologi MARA (UiTM),NANO-ElecTronic Centre (NET), Faculty of Electrical Engineering,Shah Alam,Selangor,Malaysia,40450

4. Universiti Tun Hussein Onn Malaysia,Faculty of Electrical and Electronic,Batu Pahat,Malaysia

5. Technology Universiti Tun Hussein Onn Malaysia,Faculty of Engineering,Pagoh,Malaysia

6. Universiti Tun Hussein Onn Malaysia,Microelectronics and Nanotechnology-Shamsuddin Research Centre,Batu Pahat,Malaysia

7. Politeknik Caltex Riau,Department of Electronic System Engineering,Pekanbaru,Indonesia

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10352513/10352514/10352573.pdf?arnumber=10352573

Reference11 articles.

1. Characterization of AlN Thin Films Prepared by Unbalanced Magnetron Sputtering

2. Synthesis of boron-aluminum nitride thin film by chemical vapour deposition using gas bubbler;Shanmugan;Iran. J. Mater. Sci. Eng.,2019

3. Electron-Beam Deposition of Aluminum Nitride and Oxide Ceramic Coatings for Microelectronic Devices

4. A Review of Flexible Acceleration Sensors Based on Piezoelectric Materials: Performance Characterization, Parametric Analysis, Frontier Technologies, and Applications

5. High velocity shear horizontal surface acoustic wave modes of interdigital transducer/(100) AlN/(111) diamond