A Review of Flexible Acceleration Sensors Based on Piezoelectric Materials: Performance Characterization, Parametric Analysis, Frontier Technologies, and Applications

Author:

Liao Yaoyao12,Yang Hong1,Liao Qingwei123ORCID,Si Wei12,Chu Yu4ORCID,Chu Xiangcheng5,Qin Lei123

Affiliation:

1. School of Applied Science, Beijing Information Science & Technology University, Beijing 100192, China

2. Key Laboratory of Sensors, Beijing Information Science & Technology University, Beijing 100192, China

3. Key Laboratory of Modern Measurement & Control Technology, Ministry of Education, Beijing Information Science & Technology University, Beijing 100192, China

4. Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA 15213, USA

5. State Key Laboratory of New Ceramics and Fine Processing, School of Material Science and Engineering, Tsinghua University, Beijing 100084, China

Abstract

Acceleration sensors are tools for detecting acceleration and serve purposes like fault monitoring and behavior recognition. It is extensively employed in a variety of industries, including aerospace, artificial intelligence, biology, and many more. Among these, one of the major research hotspots and challenges is the development of low-energy, self-powered, miniature, mass-produced sensors. Due to its capacity to perceive human behavior and identify errors, the flexible acceleration sensor offers a distinct advantage in the use of flexible and miniaturized sensing systems. This review analyzes the current state of piezoelectric flexible acceleration sensors’ applications in the areas of sensitive materials, processing technology, and device structure and briefly summarizes the fundamental properties of these sensors. Additionally, it ends with a prognosis for the future growth of flexible piezoelectric acceleration sensors.

Funder

National Natural Science Foundation of China

The Project of Construction and Support for high-level Innovative Teams of Beijing Municipal Institutions

Qin Xin Talents Cultivation Program, Beijing Information Science & Technology University

Publisher

MDPI AG

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces

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