Surface Morphology and Line Fill Properties of Gold Grown by Organometallic Chemical Vapor Deposition

Abstract

Dimethyl gold hexafluoroacetylacetonate, (DMAu(hfac)) was used to grow gold films by thermal decomposition. We found that surface morphology and line fill properties greatly depend on the substrate temperature and reactor pressure. Under optimum growth conditions, we have obtained gold films with flat surfaces and fine line fillings. We propose a growth model to explain the variation in surface morphology at various growth temperatures and reactor pressures.