Gaseous phase studies of new copper(II) carboxylate complexes with tert-butylamine as potential precursors for chemical vapor deposition (CVD)-Reference-Cited by-同舟云学术

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Gaseous phase studies of new copper(II) carboxylate complexes with tert-butylamine as potential precursors for chemical vapor deposition (CVD)

Published:2013-02 Issue:1 Volume:50 Page:200-207
ISSN:0277-5387
Container-title:Polyhedron
language:en
Short-container-title:Polyhedron

Author:

Szymańska Iwona B.

Publisher

Elsevier BV

Reference30 articles.

1. The Chemistry of Metal CVD;Kodas,1994

2. Surface Morphology and Line Fill Properties of Gold Grown by Organometallic Chemical Vapor Deposition

3. Multilevel interconnections for ULSI and GSI era

4. Copper(I), silver(I) and gold(I) carboxylate complexes as precursors in chemical vapour deposition of thin metallic films

5. Why is coordination chemistry stretching the limits of micro-electronics technology?

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