Design and development of a compact ion implanter and plasma diagnosis facility based on a 2.45 GHz microwave ion source-Reference-Cited by-同舟云学术

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Design and development of a compact ion implanter and plasma diagnosis facility based on a 2.45 GHz microwave ion source

Published:2021-05-01 Issue:5 Volume:92 Page:053306
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Swaroop Ram¹^ORCID,Kumar Narender²^ORCID,Rodrigues G.³^ORCID,Kanjilal D.³^ORCID,Banerjee I.⁴^ORCID,Mahapatra S. K.¹^ORCID

Affiliation:

1. Department of Physics, Central University of Punjab, Bathinda 151001, India

2. Cockcroft Institute, Warrington WA4 4AD, United Kingdom

3. Inter University Accelerator Centre (IUAC), New Delhi 110067, India

4. School for Nano Sciences, Central University of Gujarat, Gandhinagar 382030, India

Funder

Science and Engineering Research Board

Publisher

AIP Publishing

Subject

Instrumentation

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0029629

Reference32 articles.

1. Diffusion and distribution of deuterium in scandium deuteride thin films under irradiation of deuterium ion beam

2. Deterministic Single-Ion Implantation of Rare-Earth Ions for Nanometer-Resolution Color-Center Generation

3. Superintense Laser-driven Ion Beam Analysis

4. Ion beams and their applications in high-resolution probe formation

5. A review of ion sources for medical accelerators (invited)

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1. Development and Evaluation of Ferrite Core Inductively Coupled Plasma Radio Frequency Ion Source for High-Current Ion Implanters in Semiconductor Applications;Sensors;2024-08-05

2. Development of a planar ICP ion source for fusion based neutron generator;Vacuum;2024-04

3. Design of a Miniaturized Electron Cyclotron Resonance Ion Source for High-Voltage Proton Accelerator;Applied Sciences;2023-07-31

4. Probe experiment on basic plasma parameter investigation in a quasi-gasdynamic ion source GISMO;Physics of Plasmas;2023-04-01

5. Design and simulation of 2450 MHz microwave cavity for resonance and off-resonance plasma diagnosis in-situ plasma irradiation facility;Journal of Instrumentation;2023-02-01

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