EUV spectroscopy of highly chargedSn13+−Sn15+ions in an electron-beam ion trap
Author:
Funder
Nederlandse Organisatie voor Wetenschappelijk Onderzoek
European Research Council
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevA.101.062511/fulltext
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5. Physical processes in EUV sources for microlithography
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