Suspended Single-Crystal Diamond Nanowires for High-Performance Nanoelectromechanical Switches
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference30 articles.
1. Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications
2. Fabrication and characterization of a nanoelectromechanical switch with 15-nm-thick suspension air gap
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