High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures-Reference-Cited by-同舟云学术

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High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures

Published:2024-05-02 Issue: Volume: Page:1-4
ISSN:
Container-title:2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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Author:

Chen Guo¹,Zhang Zilong²,Gu Keyun²,Sang Liwen²,Koizumi Satoshi²,Toda Masaya³,Koide Yasuo²,Huang Zhaohui¹,Liao Meiyong²

Affiliation:

1. China University of Geosciences,School of Materials Science and Technology,Beijing,China,100083

2. National Institute for Materials Science,Tsukuba, Ibaraki,Japan,305-0044

3. Tohoku University,Graduate School of Engineering,Sendai, Miyagi,Japan,980-8579

Funder

China Scholarship Council

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10639541/10639542/10639909.pdf?arnumber=10639909

Reference17 articles.

1. Diamond MEMS: From Classical to Quantum

2. Dissipation in nanoelectromechanical systems

3. Progress in semiconductor diamond photodetectors and MEMS sensors

4. Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS

5. Sensing the point defects by single-crystal diamond mems resonators;Chen

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