Autofocus methods based on laser illumination

Author:

Hua Zhijie1ORCID,Zhang Xu12,Tu Dawei1

Affiliation:

1. Shanghai University

2. Huazhong University of Science and Technology

Abstract

Autofocusing system plays an important role in microscopic measurement. However, natural-image-based autofocus methods encounter difficulties in improving focusing accuracy and robustness due to the diversity of detection objects. In this paper, a high-precision autofocus method with laser illumination was proposed, termed laser split-image autofocus (LSA), which actively endows the detection scene with image features. The common non-learning-based and learning-based methods for LSA were quantitatively analyzed and evaluated. Furthermore, a lightweight comparative framework model for LSA, termed split-image comparison model (SCM), was proposed to further improve the focusing accuracy and robustness, and a realistic split-image dataset of sufficient size was made to train all models. The experiment showed LSA has better focusing performance than natural-image-based method. In addition, SCM has a great improvement in accuracy and robustness compared with previous learning and non-learning methods, with a mean focusing error of 0.317µm in complex scenes. Therefore, SCM is more suitable for industrial measurement.

Funder

National Natural Science Foundation of China

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics

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