Investigation of structural network and mechanical properties of Titanium silicon nitride (TiSiN) thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference31 articles.
1. Synthesis of Ternary Metal Nitride Nanoparticles Using Mesoporous Carbon Nitride as Reactive Template
2. Layered ternary transition metal nitrides; synthesis, structure and physical properties
3. A Review Paper on Tribological and Mechanical Properties of Ternary Nitride based Coatings
4. Densification, microstructure and properties of Si3N4Ti(C,N) composites
5. Effects of Si content and free Si on oxidation behavior of Ti–Si–N coating layers
Cited by 28 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of interlayer thickness on electrochemical properties and corrosion resistance of sputtered TiNxnm/Tixnm multilayer thin films;Materials Science in Semiconductor Processing;2024-11
2. Atomic scale formation mechanism of the Amorphous-Nanocrystalline biphase structure in TiSiN Coating: Phase field crystal simulation and experimental characterization;Applied Surface Science;2024-05
3. Phase composition, microstructure and mechanical properties of CVD Ti–B–N coatings deposited at different temperatures guided by thermodynamic calculations;Journal of Materials Research and Technology;2024-05
4. Improvising CODAS method functionalized with grey numbers to improve the performance of PVD titanium carbon nitride (TiCN) thin film coating: a novel approach;Physica Scripta;2023-11-09
5. Influence of Deposition Time on Titanium Nitride (TiN) Thin Film Coating Synthesis Using Chemical Vapour Deposition;Materials;2023-06-26
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