Effect of interlayer thickness on electrochemical properties and corrosion resistance of sputtered TiNxnm/Tixnm multilayer thin films
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Published:2024-11
Issue:
Volume:182
Page:108729
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ISSN:1369-8001
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Container-title:Materials Science in Semiconductor Processing
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language:en
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Short-container-title:Materials Science in Semiconductor Processing
Author:
Jena Sanketa,
Gupta Mukul,
Swain Bibhu P.ORCID