Author:
Xu Tao,Wu Guoying,Zhang Guobing,Hao Yilong
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference21 articles.
1. Dielectric, piezoelectric and electromechanical coupling constants of zinc oxide crystals;Crisler;Proc. IEEE,1968
2. D. DeVoe, Thin Film Zinc Oxide Microsensors and Microactuators, Ph.D. Dissertation, University of California, Berkeley, 1997.
3. A piezoelectric triaxial accelerometer;Scheeper;J. Micromech. Microeng.,1996
4. Surface micromachined piezoelectric accelerometers (PiXLs);DeVoe;J. Microelectromech. Syst.,2001
5. Study on technology of zinc oxide piezoelectric thin film device with surface micromachining substrate;Jin;Weixi Jiagong Jishu/Microfabric. Technol.,1994
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