Design and Modeling of Piezoelectric-AlN-based Acoustic Sensor for Sound Pressure Level Measurements
Author:
Affiliation:
1. CSIR-Central Electronic Engineering Research Institute, Pilani-333 031, India
2. Academy of Scientific and Innovative Research (AcSIR), Ghaziabad-201 002, India
Funder
Science and Engineering Research Board
Publisher
Informa UK Limited
Subject
Electrical and Electronic Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/02564602.2023.2169778
Reference34 articles.
1. Piezoelectric microphone built on circular diaphragm
2. A Lead-Free Spiral Bimorph Piezoelectric MEMS Energy Harvester for Enhanced Power Density
3. Bio-Inspired Rectangular Shaped Piezoelectric MEMS Directional Microphone
4. Low-temperature plasma-assisted growth of optically transparent, highly oriented nanocrystalline AlN
5. Preparation of aluminum nitride thin films by reactive sputtering and their applications to GHz‐band surface acoustic wave devices
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