A triangular electrostatic comb array for micromechanical resonant frequency tuning-Reference-Cited by-同舟云学术

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A triangular electrostatic comb array for micromechanical resonant frequency tuning

Published:1998-10 Issue:1-2 Volume:70 Page:112-117
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Lee Ki Bang,Cho Young-Ho

Publisher

Elsevier BV

Reference9 articles.

1. Laterally driven polysilicon resonant microstructures;Tang;Sensors and Actuators A,1989

2. A pure CMOS surface micromachined integrated accelerometer;Hierold,1996

3. A surface-micromachined tunable microgyroscope;Lee,1996

4. Surface-micromach-inedresonant force sensor;Roessig,1995

5. A surface micromachined capacitive absolute pressure sensor array on a glass substrate;Habibi;Sensors and Actuators A,1995

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