Laterally Driven Polysilicon Resonant Microstructures-Reference-Cited by-同舟云学术

Laterally Driven Polysilicon Resonant Microstructures

Published:1989-11 Issue:1-2 Volume:20 Page:25-32
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

Tang William C.,Nguyen Tu-Cuong H.,Howe Roger T.

Publisher

Elsevier BV

Subject

General Engineering

Reference27 articles.

1. Resonant microsensors;Howe;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,1987

2. Resonant structures for integrated sensors;Schmidt;Tech. Digest, IEEE Solid-State Sensor Workshop, Hilton Head Island, SC, U.S.A.,1986

3. Resonator sensors—a review;Langdon;J. Phys. E: Sci. Instrum.,1985

4. E.P. EerNisse J.M. Paros Practical considerations for miniature quartz resonator force transducers, Proc. 37th Ann. Symp. Freq. Control, Philadelphia, PA, U.S.A., pp. 255-260

5. Pressure dependence of resonant diaphragm pressure sensors;Smiths;Tech. Digest, 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85), Philadelphia, PA, U.S.A.,1985

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