Bayesian decision analysis for optimizing in-line metrology and defect inspection strategy for sustainable semiconductor manufacturing and an empirical study-Reference-Cited by-同舟云学术

Bayesian decision analysis for optimizing in-line metrology and defect inspection strategy for sustainable semiconductor manufacturing and an empirical study

Published:2023-08 Issue: Volume:182 Page:109421
ISSN:0360-8352
Container-title:Computers & Industrial Engineering
language:en
Short-container-title:Computers & Industrial Engineering

Author:

Chien Chen-Fu^ORCID,Hong Van Nguyen Tran,Li Yi-Chiu,Chen Ying-Jen

Funder

National Science and Technology Council

Ministry of Science and Technology, Taiwan

Publisher

Elsevier BV

Subject

General Engineering,General Computer Science

Reference44 articles.

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