IR laser-induced process for chemical vapor deposition of polyselenocarbosilane films
Author:
Publisher
Elsevier BV
Subject
Analytical Chemistry,Fuel Technology
Reference53 articles.
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2. Comprehensive Chemistry of Polycarbosilanes, Polysilazanes, and Polycarbosilazanes as Precursors of Ceramics
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5. Synthesis of dense silicon-based ceramics at low temperatures
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