Vacuum arc filtered metal plasma application in hybrid technologies of ion-beam and plasma material processing-Reference-Cited by-同舟云学术

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Vacuum arc filtered metal plasma application in hybrid technologies of ion-beam and plasma material processing

Published:2007-08 Issue:19-20 Volume:201 Page:8596-8600
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Stepanov I.B.,Ryabchikov A.I.,Nochovnaya N.A.,Sharkeev Y.P.,Shulepov I.A.,Ryabchikov I.A.,Sivin D.O.,Fortuna S.V.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference13 articles.

1. Vacuum Arcs. Theory and Application;Lafferty,1982

2. Vacuum arc deposition devices

3. A.I. Ryabchikov, I.B. Stepanov, Patent RU 2097868 C1, 1998.

4. Vacuum arc ion and plasma source Raduga 5 for materials treatment

5. Investigations of forming metal-plasma flows filtered from microparticle fraction in vacuum arc evaporators

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