THE INFLUENCE OF PLASMA ASSISTANCE MODES ON CHARACTERISTICS AND COMPOSITION OF PVD ZIRCONIUM NITRIDE COATINGS
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Published:2023
Issue:2
Volume:27
Page:19-31
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ISSN:1093-3611
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Container-title:High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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language:en
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Short-container-title:High Temp Mat Proc
Author:
Krysina Olga V.,Ivanov Yurii F.,Koval Nikolay N.,Prokopenko Nikita A.
Abstract
Zirconium nitride coatings are deposited by a vacuum-arc method at a low (0.01-0.04 Pa) nitrogen partial pressure in the modes without and with plasma assistance. The plasma assistance is provided by the operation of a gas plasma source based on a non-self-sustained arc discharge with thermionic and hollow cathodes. This new low-inertia method has not been practically studied in terms of formation of nitride coatings with different architecture (single-layer, multi-layer, gradient coatings). We note that the effect of plasma assistance (an increase of the nitrogen concentration in the nitride coating with the increasing nitrogen ion fraction in the gas-metal plasma) is practically unobservable in the ZrN coatings formed under the selected conditions. Furthermore, their phase compositions do not noticeably change and their physical, mechanical and tribological properties are not significantly improved.
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