Spatial distribution of particles sputtered from single crystals by gas cluster ions
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference19 articles.
1. Historical milestones and future prospects of cluster ion beam technology
2. Angular distributions of the particles sputtered with Ar cluster ions
3. Molecular dynamics simulation of cluster ion bombardment of solid surfaces
4. The new mechanism of sputtering with cluster ion beams
5. Computer modeling of angular emission from Ag(100) and Mo(100) surfaces due to Arn cluster bombardment
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1. Differential characteristics of the particles sputtered by gas cluster ions at elevated temperatures. Molecular dynamics simulation;Vacuum;2024-04
2. Differential Characteristics of the Particles Sputtered by Gas Cluster Ions at Elevated Temperatures. Molecular Dynamics Simulation;2023
3. Silica sputtering by noble gas projectiles: elucidating the effect of cluster species with molecular dynamic simulation;Plasma Chemistry and Plasma Processing;2022-09-21
4. Molecular dynamic simulation of rutile surface bombardment by argon cluster ions;Vacuum;2021-07
5. Energy distributions of the particles sputtered by gas cluster ions. Experiment and computer simulation;Surface and Coatings Technology;2020-12
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