Galvanoplated 3D structures for micro systems-Reference-Cited by-同舟云学术

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Galvanoplated 3D structures for micro systems

Published:1994-01 Issue:1-4 Volume:23 Page:455-459
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Löchel B.,Maciossek A.,König M.,Quenzer H.J.,Huber H.-L.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Proc. 7th. Int. Conf. Solid-State Sensors and Actuators;Yong,1993

2. Proc. 6th. Int. Conf. Solid-State Sensors and Actuators;Kawahito,1991

3. Micro System Technologies '90,1990

4. Proc. Micro Electro Mechanical Systems;Engelmann,1992

5. Proc. MME '93;Engelmann,1993

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