Nanometric cutting of single crystal silicon surfaces modified by ion implantation-Reference-Cited by-同舟云学术

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Nanometric cutting of single crystal silicon surfaces modified by ion implantation

Published:2011 Issue:1 Volume:60 Page:527-530
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Fang F.Z.,Chen Y.H.,Zhang X.D.,Hu X.T.,Zhang G.X.

Funder

Natural Science Foundation of China

National High-tech R&D Program 863

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference10 articles.

1. Surfaces in precision engineering, microengineering and nanotechnology;De Chiffre;Annals of CIRP Annals,2003

2. Towards a deeper understanding of plastic deformation in mono-crystalline silicon;Zhang;International Journal of Mechanical Sciences,2001

3. Brittle–ductile transition phenomena in microindentation and micromachining;Shimada;Annals of CIRP Annals,1995

4. Diamond cutting of silicon with nanometric finish;Fang;Annals of CIRP Annals,1998

5. On-mirror surfaces obtained with and without polishing;Venkatesh;Annals of CIRP Annals,1997

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