Single-phase polycrystalline Ti1−xWxN alloys (0⩽x⩽0.7) grown by UHV reactive magnetron sputtering: microstructure and physical properties-Reference-Cited by-同舟云学术

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Single-phase polycrystalline Ti1−xWxN alloys (0⩽x⩽0.7) grown by UHV reactive magnetron sputtering: microstructure and physical properties

Published:1994-12 Issue:1-2 Volume:253 Page:445-450
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Moser J.H.,Tian F.,Haller O.,Bergstrom D.B.,Petrov I.,Greene J.E.,Wiemer C.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference34 articles.

1. Ti-W-alloy interaction with polycrystalline silicon

2. Titanium‐tungsten contacts to Si: The effects of alloying on Schottky contact and on silicide formation

3. Application of Ti: W barrier metallization for integrated circuits

4. Al/TiW reaction kinetics: Influence of Cu and interface oxides

5. Study of the Thermal Stability of the Al / TiW / TiSi2 / Si Structure

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1. Solid Solutions in Films of Ternary Carbides and Nitrides of Groups IV–VI Transition Metals: Structure and Properties (Review);Journal of Superhard Materials;2021-07

2. Characterization of nano-crystalline Ti–W–N thin films for diffusion barrier application: a structural, microstructural, morphological and mechanical study;Applied Physics A;2018-11-11

3. Conductive nitrides: Growth principles, optical and electronic properties, and their perspectives in photonics and plasmonics;Materials Science and Engineering: R: Reports;2018-01

4. Cross-plane thermal conductivity of (Ti,W)N/(Al,Sc)N metal/semiconductor superlattices;Physical Review B;2016-01-21

5. Dry Sliding and Abrasive Wear Behavior of Nanostructure Zr–W–N Coating;Transactions of the Indian Institute of Metals;2015-02-24

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