Author:
Misumi Ichiko,Sugawara Kentaro,Takahata Keiji,Takahashi Kayori,Ehara Kensei
Funder
National Institute of Advanced Industrial Science and Technology
Reference36 articles.
1. International Technology Roadmap for Semiconductors,2013
2. Absolute contamination products,2017
3. Measurement of the 100nm NIST SRM 1963 by differential mobility analysis;Mulholland;Aerosol Sci Technol,1999
4. Evaluation of uncertainty in relative size measurement of monodisperse particles smaller than 100 nm with the DMA-moment method;Takahata;Proc. of the 22nd Symposium on AEROSOL SCI. & TECH.,2005
5. Recent activity of international comparison for nanoparticle size measurement;Takahashi;Proc SPIE,2014
Cited by
18 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献