Thermodynamic control of MEMS meteorology pressure sensing element in low‐temperature application down to −45°C-Reference-Cited by-同舟云学术

Thermodynamic control of MEMS meteorology pressure sensing element in low‐temperature application down to −45°C

Author:

Du Lidong¹²,Zhao Zhan¹³,Fang Zhen¹³,Feng Yu²,Yan Jize²

Affiliation:

1. State Key Laboratory of Transducer TechnologyInstitute of ElectronicsChinese Academy of SciencesBeijing100190People's Republic of China

2. Nano Group, Electronics and Computer ScienceUniversity of SouthamptonSouthamptonSO17 1BJUK

3. School of ElectronicsElectrical and Communication EngineeringUniversity of Chinese Academy of SciencesBeijing100049People's Republic of China

Funder

China Scholarship Council

National Natural Science Foundation of China

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics

Link

Reference20 articles.

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