MECHANICAL STABILITY OF Ir ELECTRODES USED FOR STACKED SrBi2Ta2O9 FERROELECTRIC CAPACITORS-Reference-Cited by-同舟云学术

MECHANICAL STABILITY OF Ir ELECTRODES USED FOR STACKED SrBi2Ta2O9 FERROELECTRIC CAPACITORS

Published:2006-08-17 Issue:1 Volume:81 Page:37-45
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

LISONI J. G.¹,JOHNSON J. A.¹,EVERAERT J. -L.¹,GOUX L.¹,MEEREN H. VANDER¹,PARASCHIV V.¹,WILLEGEMS M.¹,MAES D.¹,HASPESLAGH L.¹,WOUTERS D. J.¹,CAPUTA C.²,ZAMBRANO R.²

Affiliation:

1. a IMEC, Kapeldreef 75, B-3001 , Leuven, Belgium

2. b STMicroelectronics, Stradale Primosole , Catania, 95121, Italy

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580600657898

Reference19 articles.

1. Developing a conductive oxygen barrier for ferroelectric integration

2. Integration of MOCVD SBT Stacked Ferroelectric Capacitors in a 0.35 μ m CMOS Technology

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