The Effect of Microstructure on AlN MEMS Resonator Response
Author:
Affiliation:
1. a U.S. Army Research Laboratory, 2800 Powder Mill Road, Adelphi, Maryland 20783, USA
2. b University of Maryland, College Park, Maryland, USA
Publisher
Informa UK Limited
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/10584580390258976
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