Perfluorocompounds emission reduction by the semiconductor industry

Author:

Illuzzi Francesca,Thewissen Harry

Publisher

Informa UK Limited

Subject

Public Health, Environmental and Occupational Health,General Environmental Science,Renewable Energy, Sustainability and the Environment

Reference6 articles.

1. Allgood, C, Hsu, S, Birmingham, B and Soucy, J. A Critical Comparison of Chamber Cleaning Processes in an Applied Materials PECVD Tools. Proceedings of the SEMICON Southwest `A Partnership for PFC Emissions Reductions' Seminar, paper #9. Austin October 16, 2000.

2. Intergovernmental Panel on Climate Change. 2006. “IPCC guideline for national greenhouse gas inventories, vol 3 – Edited by Simon Eggelston, Leandro Buendia, Kyoko Miwa, Todd Ngara, Kiyoto Tanabe. Published by the Institute for Global Environmental Strategies (IGES) for the IPCC ISBN 4-88788-032-4”.

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