Combining machine learning and molecular simulation to explore MOF materials that contribute to CF4/N2 separation
Author:
Funder
National Key Research and Development Program of China
Publisher
Elsevier BV
Reference39 articles.
1. Separation of CF4/N2, C2F6/N2, and SF6/N2 mixtures in amorphous activated carbons using molecular simulations;Peng;ACS Appl. Mater. Interfaces,2020
2. Amino-functionalized microporous MOFs for capturing greenhouse gases CF4 and NF3 with record selectivity;Wang;ACS Appl. Mater. Interfaces,2022
3. Surface wave plasma abatement of CHF3 and CF4 containing semiconductor process emissions;Wofford;Environ. Sci. Tech.,1999
4. Perfluorocompounds emission reduction by the semiconductor industry;Illuzzi;J. Integr. Environ. Sci.,2010
5. Adsorption interface-induced H...F charge transfer in ultramicroporous metal-organic frameworks for perfluorinated gas separation;Wu;Ind. Eng. Chem. Res.,2022
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