Author:
Zhu Yan-qing,Chen Bei,Gao Di,Qin Ming,Huang Qing-an,Huang Jian-qiu
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference37 articles.
1. Adamec RJ, Thiel DV (2010) Self heated thermo-resistive element hot wire anemometer. IEEE Sens J 10(4):847–848
2. Baltes H, Paul O, Brand O (1998) Micromachined thermally based CMOS microsensors. Proc IEEE 86:1660–1678
3. Chen J, Liu C (2003) Development and characterization of surface micromachined out-of-plane hot-wire anemometer. J Microelectromech Sys 12(6):979–988
4. Cubukcu AS, Zernickel E, Buerklin U, Urban GA (2010) A 2D thermal flow sensor with sub-mW power consumption. Sens Actuators A 163(2):449–456
5. Ebefors T, Kälvesten E, Stemme G (1998) Three dimensional silicon triple-hot-wire anemometer based on polyimide joints. Proccedings of IEEE. Eleventh annual international workshop on micro electro mechanical systems. An investigation of micro structures, Heidelberg, pp 93–98
Cited by
11 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献