A Piezoelectric Micropump Using Resonance Drive with High Power Density
Author:
Affiliation:
1. Precision and Intelligence Laboratory, Tokyo Institute of Technology
Publisher
Japan Society of Mechanical Engineers
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Link
http://www.jstage.jst.go.jp/article/jsmec/45/2/45_2_502/_pdf
Reference10 articles.
1. (1) Special Issue, Micromachines, J. Jpn. Soc. Mech. Eng., (in Japanese), Vol. 97, No. 905 (1994).
2. A Study on a Micro-Actuator Using Fluid Power. 1st Report, Research on an Actuator Type Suitable for Micro-Mechanisms and Its Application to an In-Pipe Mobile Machine.
3. (3) Yoshida, K., Mawatari, H. and Yokota, S., An In-Pipe Mobile Micromachine Using Fluid Power Traversable Branched Pipes, Proc. Third JHPS International Symposium on Fluid Power, (1996), pp. 229-234.
4. Microflow devices and systems
5. Microfluidics-a review
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