1. Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
2. Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
3. Division of Materials
and Manufacturing Science, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
4. Sumitomo Heavy Industries Process Equipment Co., Ltd., 1501 Imazaike, Saijo-city, Ehime 799-1393, Japan
5. Sumitomo Heavy Industries
Process Equipment Co., Ltd., 1501 Imazaike, Saijo-city, Ehime 799-1393, Japan