Surface Finishing and Evaluation of Three-Dimensional Silicon Microchannel Using Magnetorheological Fluid
Author:
Kim Wook-Bae1, Lee Seung-Hwan1, Min Byung-Kwon1
Affiliation:
1. School of Mechanical Engineering, Yonsei University, 134 Shinchon, Seodaemun, Seoul 120-749, Korea
Abstract
A surface-finishing method for three-dimensional microchannel structures is proposed. The method utilizes magnetorheological fluid mixed with abrasives as a polishing tool. The influences of the process parameters on the material removal were investigated, and the surface topographies before and after finishing were compared. When a microchannel was finished by proposed method, the roughness of bottom and side surfaces of the silicon channel was reduced by a factor of 5–10, and the pressure drop of a gas flow through the single microchannel was lowered to 26.7% of the pressure drop in an unfinished microchannel. The experimental results demonstrated that the proposed method was effective in finishing of microstructures.
Publisher
ASME International
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering
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