Dielectric breakdown of silicon nitride substrates with various thicknesses
Author:
Affiliation:
1. National Institute of Advanced Industrial Science and Technology (AIST)
2. Japan Fine Ceramics Co., Ltd.
Publisher
Ceramic Society of Japan
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry,Ceramics and Composites
Link
https://www.jstage.jst.go.jp/article/jcersj2/126/9/126_18087/_pdf
Reference28 articles.
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4. 4 P. F. Becher, E. Y. Sun, K. P. Plucknett, K. B. Alexander, C. H. Hsueh, H. T. Lin, S. B. Waters and C. G. Westmoreland, J. Am. Ceram. Soc., 81, 2821–2830 (1998).
5. 5 Y. Zhou, X. Zhu, K. Hirao and Z. Lences, Int. J. Appl. Ceram. Tec., 5, 119–126 (2008).
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