Fabrication of Micro-Lens Array by Replication of Self-Assembled Particles Profiles and Application of Mold Deformation to Obtain Aspheric Lens Array
Author:
Affiliation:
1. 東京都立大学
2. 首都大学東京システムデザイン研究科
Publisher
Japan Society for Precision Engineering
Subject
Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/jjspe/88/2/88_206/_pdf
Reference12 articles.
1. 1) R. Stevens and T. Miyashita: Review of standards for microlenses and microlens arrays, The Imaging Science Journal, 58, 4 (2010) 202.
2. 2) W. Yuan, L.‑H. Li, W.‑B. Lee and C.‑Y. Chan: Fabrication of microlens array and its application: A review, Chinese Journal of Mechanical Engineering, 31, 16 (2018).
3. 3) K. Totsu, K. Fujishiro, S. Tanaka, and M. Esashi: Fabrication of three-dimensional microstructure using maskless gray-scale lithography, Sensors & Actuators: A, 130-131 (2006) 387.
4. 4) K. Zhong, H. Zhang, and Y. Gao: Fabrication of high fill-factor aspheric microlens array by digital maskless lithography, Optik, 142 (2017) 243.
5. 5) S. Huang, M. Li, L. Shen, J. Qiu., Y. Zhou: Fabrication of high quality aspheric microlens array by dose-modulated lithography and surface thermal reflow, Optics and Laser Technology, 100 (2018) 298.
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