Analysis of Sputtering Yield Measurements for Ion Thruster Grid Materials

Abstract

Grid assembly is one of the key components of an ion thruster and directly affects the performance and life of the thruster. The measurement of the sputtering yield of the grid assembly under ion beam bombardment is highly significant for predicting the lifetime of the grid assembly and ion thruster. This study systematically summarizes the main methods currently used for sputtering yield measurement of grid materials, analyzes the advantages and disadvantages of different measurement methods, and provides suggestions for sputtering yield measurements in the low-energy ([Formula: see text]) range. In addition, this study compares the sputtering resistance properties of metal- and carbon-based grid materials and summarizes the influence of key core parameters, such as the surface roughness, surface morphology, binding energy, and incident angle, on the sputtering yield. The results can be used to guide the correction of the sputter yield theoretical formula and the numerical simulation of sputtering erosion.