1. The Institute of Scientific and Industrial Research (SANKEN), Osaka University, Ibaraki, Japan
2. Micro-Joining Center, Korea Institute of Industrial Technology (KITECH), Incheon, South Korea
3. Jiangsu Key Lab of Advanced Food Manufacturing Equipment and Technology, School of Mechanical Engineering, Jiangnan University, Wuxi, China
4. Yamato Scientific Company Ltd., Tokyo, Japan