Analysis of Ferroelectric Negative Capacitance-Hybrid MEMS Actuator Using Energy–Displacement Landscape
Author:
Affiliation:
1. Department of Electrical Engineering, Indian Institute of Technology Palakkad (IIT Palakkad), Palakkad, India
Funder
Science and Engineering Research Board (SERB), Government of India
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx7/16/9780469/09758831.pdf?arnumber=9758831
Reference46 articles.
1. Experimental study on polarization-limited operation speed of negative capacitance FET with ferroelectric HfO2;kobayashi;IEDM Tech Dig,2016
2. Demonstration of high-speed hysteresis-free negative capacitance in ferroelectric Hf0.5Zr0.5O2;hoffmann;IEDM Tech Dig,2018
3. Negative Capacitance Field Effect Transistor With Hysteresis-Free Sub-60-mV/Decade Switching
4. Negative Capacitance FinFET With Sub-20-mV/decade Subthreshold Slope and Minimal Hysteresis of 0.48 V
5. Negative capacitance transistor with twodimensional channel material (Molybdenum disulfide, MoS2);choi;Phys Status Solidi (a),2019
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Ferroelectric Negative Capacitance Inspired Driver Circuits for Electrostatic MEMS Actuators;2022 IEEE International Conference on Emerging Electronics (ICEE);2022-12-11
2. Stable Deflection in Ferroelectric Negative-Capacitance Hybrid MEMS Actuator With Cubic Nonlinear Spring;IEEE Transactions on Electron Devices;2022-09
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