Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers-Reference-Cited by-同舟云学术

Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers

Published:2023-10 Issue:5 Volume:32 Page:461-473
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Chen Hung-Yu¹^ORCID,Shih Po-I¹,Ali Washim Reza¹^ORCID,Li Ming-Huang²^ORCID,Li Sheng-Shian³^ORCID

Affiliation:

1. Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan

2. Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan

3. Department of Power Mechanical Engineering and the Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan

Funder

National Science and Technology Council (NSTC) of Taiwan

Toward World-Class University Project

Taiwan Semiconductor Research Institute (TSRI) and Taiwan Semiconductor Manufacturing Company Limited (TSMC), Hsinchu, Taiwan

Complementary metal-oxide-semiconductor (CMOS) Chip Fabrication

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/10269337/10178018.pdf?arnumber=10178018

Reference23 articles.

1. A 200-nm-gap Titanium Nitride Composite CMOS-MEMS CMUT for Biomedical Ultrasounds

2. A reliable CMOS-MEMS platform for titanium nitride composite (TiN-C) resonant transducers with enhanced electrostatic transduction and frequency stability

3. A Monolithic CMOS-MEMS Oscillator Based on an Ultra-Low-Power Ovenized Micromechanical Resonator

4. Tiny-Gap Titanium-Nitride-Composite MEMS Resonator Designs With High Power Handling Capability

5. 5 V-bias CMOS-MEMS capacitive resonator with RM < 5KO based on metal-insulator-metal (MIM) capacitor;chen;Proc IEEE 35th Int Conf Micro Electro Mech Syst Conf (MEMS),2022

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1. Geometrically engineered mass sensing CMOS-MEMS resonators for temperature compensation via folded anchors;Sensors and Actuators A: Physical;2024-08

2. Multi-harmonic phononic frequency comb generation in capacitive CMOS-MEMS resonators;Applied Physics Letters;2024-04-15

3. A Bipolar-Biased Differential CMOS-MEMS CMUT;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21