High Accuracy Resonant Pressure Sensor With Balanced-Mass DETF Resonator and Twinborn Diaphragms
Author:
Funder
China Aviation Industry Academy Research projects
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Link
http://xplorestaging.ieee.org/ielx7/84/7839304/07776835.pdf?arnumber=7776835
Reference23 articles.
1. A Review of Silicon Micromachined Resonant Pressure Sensor
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