Author:
Bourouina T.,Masuzawa T.,Fujita H.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Cited by
59 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Stress Concentration Relief Structure Using Micro-Loading Effect for Cantilever Beam Vibration Energy Harvesters;IEEJ Transactions on Sensors and Micromachines;2023-08-01
2. MEMS Cantilevered Energy Harvester with Tapered Thickness for Stress Control;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
3. Thickness Control of Cantilever Beam for Robust and High-Power Mems Energy Harvester;2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS);2022-12-12
4. Towards the Fabrication of High-Aspect-Ratio Silicon Gratings by Deep Reactive Ion Etching;Micromachines;2020-09-18
5. Deep reactive ion etching;Handbook of Silicon Based MEMS Materials and Technologies;2020