Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications
Author:
Affiliation:
1. Department of Microelectronics, VTT Technical Research Centre of Finland, Espoo, Finland
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/10035829/09942708.pdf?arnumber=9942708
Reference39 articles.
1. Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures
2. Precision readout circuits for capacitive microaccelerometers
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4. A pseudo-differential charge balanced ratiometric readout system for capacitive inertial sensors
5. Surface versus bulk micromachining: the contest for suitable applications
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