Motion Detection Method of Electrostatic MEMS Resonators Operating in Aqueous Media-Reference-Cited by-同舟云学术

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Motion Detection Method of Electrostatic MEMS Resonators Operating in Aqueous Media

Published:2024-02-29 Issue: Volume: Page:1-6
ISSN:
Container-title:2024 6th International Youth Conference on Radio Electronics, Electrical and Power Engineering (REEPE)
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Author:

Hemid Mohamed¹,Alattar Basil²,Ghommem Mehdi²,Ahmed Alaaeldin³,Abdel-Rahman Eihab³,Sabouni Rana⁴

Affiliation:

1. Mechatronics Graduate Program, American University of Sharjah,Sharjah,UAE

2. American University of Sharjah,Mechanical Engineering Department,Sharjah,UAE

3. Systems Design Engineering, University of Waterloo,Ontario,Canada

4. American University of Sharjah,Chemical Engineering Department,Sharjah,UAE

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10479558/10479559/10479756.pdf?arnumber=10479756

Reference17 articles.

1. Principles of Chemical Sensors

2. A MEMS Density-Viscosity Sensor Based on Electrostatically Actuation of a Comb-Drive Structure

3. Ex Vivo Blood Viscosity Monitoring with Piezoelectric MEMS Resonators

4. CMOS–MEMS VOC sensors functionalized via inkjet polymer deposition for high-sensitivity acetone detection

5. Quality Factor Enhancement of Lateral Microresonators in Liquid Media by Hydrophobic Coating

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