Dual-Parallel-Pixel-Row Decoupling Method for Camera-Based Three-Degree-of-Freedom Interferometers-Reference-Cited by-同舟云学术

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Dual-Parallel-Pixel-Row Decoupling Method for Camera-Based Three-Degree-of-Freedom Interferometers

Published:2024-08-15 Issue:16 Volume:24 Page:26190-26198
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Hu Pengcheng¹^ORCID,Lin Xionglei¹^ORCID,Molnar Gabor²^ORCID,Werner Christian²^ORCID,Fu Haijin¹,Yang Ruitao¹,Flügge Jens³,Yu Liang¹^ORCID

Affiliation:

1. Ultra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, and the Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry and Information Technology, Harbin Institute of Technology, Harbin, China

2. Unisurf Mechatronics Ltd., Suzhou, China

3. Physikalisch-Technische Bundesanstalt (PTB), Brunswick, Germany

Funder

National Natural Science Foundation of China

Natural Science Foundation of Heilongjiang Province

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx8/7361/10637303/10599176.pdf?arnumber=10599176

Reference24 articles.

1. Recent developments and challenges of nanopositioning and nanomeasuring technology

2. Precision Measurement Method of Laser Beams Based on Coordinate Measuring Machine

3. Direct Measurement of Three-Dimensional Forces in Atomic Force Microscopy

4. Laser homodyne straightness interferometer with simultaneous measurement of six degrees of freedom motion errors for precision linear stage metrology

5. Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage

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